Process development for gas sensors employing tungsten trioxide nanostructured layers

This thesis focuses on the work done by the author within the Erasmus project at the MINOS Research Group (directed by prof. Eduard Llobet Valero) of the Departament d’Enginyeria Electronica Electrica i Automatica - DEEEA of the Universitat Rovira i Virgili of Tarragona (ES).
The main objectives of this project consisted in fabricating and characterizing gas sensors employing nanostructured layers of tungsten oxide deposited onto a microelectronic substrate, which have been developed as well. This work has been conducted at the clean room facility of the University, at the microscopy unit, at the fabrication laboratory and at sensor characterization facility. Since many of the steps involved in the sensor design were performed for the first time in the labs and the author was in charge to set them; this thesis focuses on the major attempts done in order to obtain a working process to get a first sensor prototype.
The thesis first deals with some theoretical introduction principles, then explains the morphology of the sensor that we would like to obtain and the instrumentation that is possible to use in the University. Finally, after the explanations of the attempts done, the final working process is described and the sample devices obtained are characterized.